Oblique viewing microscope system

ABSTRACT

An improved oblique viewing microscope system including a diffraction grating that oscillates in the plane of the grating and/or an illuminator that oscillates the light rays directed to the object synchronized with the grating period. Additionally, a low frequency diffraction grating is also disclosed. The oscillation and/or low frequency grating provide a high resolution, multi-color image of an object viewed at an oblique angle. A dual oblique viewing microscope system is also disclosed to provide Koehler illumination.

This application claims the benefit of the filing date U.S. application,Ser. No. 08/283,053 filed on Jul. 29, 1994 entitled IMPROVED OBLIQUEVIEWING MICROSCOPE SYSTEM to Chastang et al now abandoned.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention is directed to oblique viewing optical systems andmore particularly to an improved oblique viewing microscope forproviding a high-resolution multi-color image of an object.

2. Description of the Prior Art

Manufacturing inspection systems are of great importance as qualitycontrol improvement can provide a significant advantage in today'shighly competitive marketplace. For example, in the manufacture ofsemiconductor chips, the inspection of solder pads for connecting thechips to a wafer or other substrate is a critical element for achievinghigh production efficiency in what is now known as "flip chip"technology.

U.S. Pat. No. 4,428,676, assigned to the same assignee as the presentinvention and having a common inventor, discloses an oblique viewingmicroscope (OVM) that significantly improved the speed and informationobtained by optical inspection of the solder pads. The prior art OVMuses a 1:1 relay lens to project a monochromatic image of a substrate atan oblique angle with the normal to the substrate, onto a diffractiongrating, at an oblique angle to the normal of the grating. Both obliqueangles are equal to a common value α.

Because it is obtained obliquely, the image of a solder pad array ascaptured by the OVM includes information relating to the height andvolume of the pads from the size of the shadows of the solder pads thatare observed. More generally, the OVM can be used to study thetopography of three dimensional objects without scanning and/orrefocusing. By contrast the previously known inspection equipment, usingconventional optics, scans much smaller instantaneous fields, and istherefore much slower than the OVM system.

The diffracting grooves of the diffraction grating and the imagingobliquity are matched to the particular wavelength in such a way thatthe image is deflected into a microscope as if from an untilted objectplane, i.e., in a direction substantially perpendicular to the plane ofthe grating, thus allowing magnification. For the previous condition tobe fulfilled, there must exist between the wavelength λ of theillumination, the period a of the grating the relationship:

    sin α=nλ/a, where n is an integer.

The resolution of the microscope must be held below the period of thegrating, in order that the grating grooves not modulate or "break-up"the image. Moreover, even when the objective is not capable of resolvingthe grating directly, it is also necessary to prevent the image frombeing distorted by coarser "Moire" type spatial frequencies that arisefrom interaction between object spatial frequencies and the spatialfrequency harmonics of the grating. In other words, the spatialfrequency content of the object causes each order diffracted from thegrating to spread into a cone (of perimeter defined by the relay lenspupil), rather than propagating as a plane wave. In the prior art OVM,only one of these cones is collected by the microscope objective to formthe image. The wavelength, grating and objective numerical aperture (NA)must be chosen so that all other cones are excluded in their entirety.While the prior art OVM system works well for some products, lowcontrast conditions often occur that cause the solder pads to becomedifficult to distinguish from the background. Poor contrast conditionsappear to be due principally to diffraction from increasingly finesubstrate circuitry, and to the presence of dielectric thin filmovercoats (such as SiO₂). The thickness of this film variessignificantly, causing strong variations in the monochromaticreflectivity of the chip.

Modern chips employ circuit and process film dimensions that can nolonger be considered large on the scale of an optical wavelength. Sincechips are optimized for reliability in their electrical propertiesrather than their coherent optical properties, chips invariably haveconsiderable variation in their optical scattering characteristics. Thecontrast loss mechanisms result from a mismatch between the OVMwavelength and the chip structure and features. To ensure that a fulldiversity of chips be handled without problem, it is desirable for theimaging system to be as robust and flexible as possible. Suchflexibility should include control over the NA and the spectrum.

SUMMARY OF THE INVENTION

The present invention is directed to improvements in the OVM system thatsolve the poor contrast problems of the prior art OVM, and therestriction to monochromatic illumination within limited NA.

In one embodiment, the NA of the detection objective and the wavelengthspectrum are increased by oscillating the diffraction grating in theplane of the grating and/or oscillating the illumination source. Themotion must be rapid enough to traverse an individual grating period ina time that is short compared to the integration time or response timeof the detection objective. The oscillation in a preferred embodiment isby dithering, for example by oscillation in a saw-tooth or triangularwaveform, such that the time-averaged diffracted orders are renderedincoherent with respect to one another, leaving the image unmodulated bygrating fringes even when multiple orders enter the objective.

In another embodiment a low frequency diffraction grating, one in whichthe grating period is in the range of about 30 to 600 lines per mm, isused to replace the prior art high frequency grating (1200 to 1800 linesper mm). The use of a sufficiently low frequency grating solves theproblem of the prior OVM system being limited to operation at aparticular wavelength. In accordance with the present invention an OVMhaving a low frequency grating allows multiple orders at one or morewavelength to enter the detection objective lens in a symmetric way toprovide a high contrast image. In the prior art OVM, the resolution ofthe detection objective cannot be fine enough to resolve the gratingperiod. The low frequency oscillated grating OVM of the presentinvention removes the constraint on the size of the NA of the detectionobjective, i.e. the constraint on its resolution, as well as allowing abroader spectrum of wavelength to be used for illumination, resulting ina multi-color image to further enhance the viewing capabilities.

The OVM of the present invention has many applications beyond chipinspection. White light and variable resolution tend in general toprovide better understanding of a scene or specimen. Any industrialprocess in which a substrate is bombarded, coated, or fetched fromdirectly overhead is a natural candidate for oblique viewing. Aconventional chamber window allows only low NA observation (e.g. withthe unaided eye or with a low power microscope), which is ofteninsufficient to resolve in-situ contaminant generation, etc. The presentinvention allows the process to be monitored in color with adjustableresolution and magnification.

In a preferred embodiment, the OVM includes both a low frequencydiffraction grating and means for oscillating the grating and in analternative embodiment oscillating the grating in conjunction with theillumination source. The oscillation feature together with a lowfrequency grating provides a polychromatic OVM in which the microscopeobjective is allowed to collect from the grating multiple diffractionorders in a plurality of wavelengths that are rendered incoherent withrespect to each other resulting in a very high resolution, highcontrast, multi-color image for viewing the illuminated object formanufacturing inspection or other purposes.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a schematic view of one embodiment of the OVM system inaccordance with the present invention;

FIG. 2 is an enlarged side view of a beam of light having an obliqueincidence to the solder mounds on the chip of FIG. 1;

FIG. 3 is a schematic view of the viewing portion associated with theoptical system of FIG. 1;

FIGS. 4 and 5 are schematic illustrations of a low frequency diffractiongrating in accordance with the present invention;

FIG. 6 is a schematic view of a dual OVM embodiment of the presentinvention.

FIG. 7 shows a slotted filter in accordance with the present invention;and

FIG. 8 shows an optical system in accordance with another embodiment ofthe present invention.

DETAILED DESCRIPTION OF THE INVENTION

In accordance with a specific embodiment of this invention as shown inFIG. 1, the optical system 10 includes illuminator 12 which provides asource of light. A non-limiting example of an illuminator 12 is aprojector lamp. A beam of light 14 from the illuminator strikes the chip20 having the solder mounds 22 thereon.

An enlarged view of the light 14 striking the chip 20 is shown in FIG.2. The beam of light 14 strikes a chip and solder mounds 22A and 22B atan angle Θ₁ which in this case is 45°. While Θ₁ in this example is 45°,this angle may vary from about 30° to 60° or more depending on theparticular application. Solder mounds or pads 22A are larger than soldermound 22B and, accordingly, the shadows 24A are larger than the shadow24B. Since the chip 20 is quite specular, substantially all of theincident light 14 is reflected as light beam 25 and very little light isscattered in the direction perpendicular to the plane of the pad array.The reflected light 25 makes an angle of θ₂ with the perpendicular tothe chip 20. Θ₂ is equal to θ₁ and in this case Θ₂ is 45°.

As shown in FIG. 1, a lens 26 is positioned in the path of the reflectedbeam 25 so that the axis of the lens is parallel to the reflected beam25. The lens 26 images the solder mound array onto a diffraction grating28 with a magnification of substantially -1×. It is essential that themagnification be unity in absolute value for it is only in this casethat when the object is tilted with respect to the optical axis, thatthe image is equally tilted but in the opposite direction, and so doesnot present the usual defects that magnified tilted images present suchas anamorphosis and the keystone distortion. In a preferred embodiment,the lens 26 should also be telecentric and afocal. However, thisrestriction can be lifted in certain less demanding applications(typically non-metrological applications) or when the field to beobliquely observed is very small. While the lens 26 is an example of adioptric system, it is possible to substitute a catoptric system or acatadioptric system for the lens 26. In all cases the magnification ofthe system must be substantially one (absolute value).

In a preferred embodiment of the present invention, the OVM systemincludes means for oscillating the diffraction grating in its own plane.FIG. 1 includes means 60, which can be a motor driven system, a piezodrive, a vibrating spring system or other suitable system for moving thegrating back and forth in the-general direction shown by the arrows 62.In an alternative embodiment, the illumination pattern 14 is oscillatedby an oscillating means 64 coupled to illuminator 12. In a furtheralternative embodiment, both the illuminator 12 and grating 28 areoscillated, preferably in synchronization. The oscillation must be rapidenough to traverse an individual grating period in a short time comparedto the integration time or response time of the objective instrument 32,or observer. Illustratively, the distance of each oscillation cycle isless than the depth of focus of the objective lens 32. In a preferredembodiment, dithering the grating in-plane with a triangular waveformresults in the time-averaged diffracted orders being rendered incoherentwith respect to one another, leaving the image unmodulated by gratingfringes even when multiple orders enter the objective. The total imageproduced by such multiple incoherent orders is analogous to thatproduced using off-axis illumination in photolithography. To avoidstroboscopic effects with non-static specimens, a grating oscillationfrequency must be chosen that avoids all frequencies of the objectmotion.

When broadband illumination is used, it is desirable that the objectiveNA be large enough to substantially enclose at least two of the cones oflight diffracted by the grating in each wavelength. In this way theincoherent superposition that comprises the total image will includedominant components whose object spatial frequencies are notsignificantly vignetted by the objective. This is not a strongrequirement; a similar truncation arises in conventional microscopy whenthe illumination aperture is opened wide. Moreover, the empty resolutionobtained with an objective NA that too greatly exceeds the relay NA canactually be deleterious with an OVM. Even when the orders are renderedincoherent using the present invention, the image can be altered by aripple effect. This arises as the object undergoes minute ripples in andout of the focal plane while undergoing reflection from the movingcorrugated surface of the grating. Images formed from single diffractedorders show no such ripple. In the opposite geometrical limit in whichmany coherent orders enter the objective, the image undergoes a ripplethat fully matches the ripple at the grating plane, limiting theallowable coarseness of the grating. One can consider the image formedfrom multiple orders that are incoherent to be blurred because of thedifferent oblique perspectives with which features are seen in theincoherent component images. Excessive object NA that unnecessarilyextends this range of perspectives is preferably avoided.

In a preferred embodiment, the oblique geometry is exploited to obtain asuitable compromise, in a very convenient way. At angles of obliquity inthe vicinity of 60°, object features are foreshortened by about 2× whenviewed by the relay lens, and this reduction in apparent size implies aneffective approximate 2× reduction in the relay lens NA relative to theobjective NA. If the NAs of the relay lens 26 and objective lens 26 arenominally equal in the conventional sense, one finds that this 2×effective difference yields a system in the above mentioned desirableconfiguration where the objective forms its image from 2 or 3 diffractedorders in every wavelength. In many cases there would also be littlepoint in employing a higher NA objective with a blazed grating, becausethe narrow scatter function of each blaze would leave little energy inthe additional orders that the increased NA would intercept.

The capabilities of such a system are then limited only by the opticaldesign of the relay lens and objective. There is also a practical limitof 0.5 NA at 60° with reflection gratings, in the absence of abeamsplitting arrangement. There is no such limit when the sample isviewed in transmission. Further, the present invention removes apractical impediment to transmission mode operation of the OVM, in thatthe inevitable cosmetic blemishes seen in transmission gratings can beblurred to invisibility by the grating motion. Cosmetic blemishes arepresent even with reflection gratings and this problem is greatlyreduced by the present invention.

The motion can also be advantageous in high fluence applications toprevent grating damage. In one particular application, it was found thata faint burned-in image of the solder pads eventually imprinted on theprior art static grating. This image (a superposition of a large numberof individual chip images) could theoretically become strong enough tomask defects in the true chip image. The proposed grating motion woulddilute the peak fluence, and would cause all grating grooves to receivethe same time-averaged exposure.

Referring again to FIG. 1, the image of the solder mound array that isreflected by the grating 28 as beam 30 is magnified by a microscopeobjective 32 and projected onto the photosensitive surface (not shown)of the TV camera 34. The optical axis of the TV camera lens 34 is normalto the grating 28. The reflected beam 30 is substantially normal to thegrating 28 and forms an oblique angle θ₃ with the beam 25 which isreflected from the chip 20 and focused by lens 26. This oblique angle θ₃is equal to the oblique angle θ₂, which is equal to the oblique angleθ₁, i.e., θ₃ =θ₂ =θ₁. The TV camera 34 shown in FIG. 1 is connected to adigital image analyzer 36 as shown in FIG. 3. The image analyzer 36 isconnected to a display screen 38 on which the chip image is shown. Inthe embodiment described above, the use of a T.V. camera is exemplary.In fact, other detectors could be used such as the human eye, aphotographic emulsion, etc.

In accordance with another embodiment of the present invention, thediffraction grating is a low frequency grating having a grating periodin the range of about 30 lines per mm to about 600 lines per mm. Adiffraction grating is a reflection or transmission optical device thatincludes a series of grating lines or grooves to diffract the lightscattered by the grating. The depth spacing or period and shape of thegrooves defines the nature of the light diffraction. The grating periodis often indirectly defined by the number of lines or grooves per aspatial measurement, typically in mm. A common diffraction grating isformed with a series of blazes or facets on the surface of the opticalelement, such as that illustrated in cross-sectional view in FIG. 4. Thegratings consist of the juxtaposition of a number of identical facets 40all parallel to each other. These facets 40 may, in the geometricallimit, be treated as small mirrors which are oriented at an angle α'with the surface 42 of the grating. The incident light rays 44 make anangle α' with the grating surface 42 and an angle α" with the normal ofthe surface 42. The light rays are reflected parallel to the normal ofthe grating surface 42. The use of a sufficiently low frequency gratingallows multiple orders to enter the objective at each wavelength, sothat light from the ensemble of wavelengths of a polychromatic lightsource will fill the objective in a substantially symmetric way. Inaddition, if a monochromatic light source is used, multiple orders atthe particular wavelength will enter the objective lens 32 substantiallysymmetrically. The NA of the objective lens 32 is chosen accordingly tocapture a particular wavelength when monochromatic light is used or twoor more wavelengths when polychromatic light, such as white light, isused. In both cases, improved contrast and resolution in the resultantimage is achieved. The resolution however is lower than if dithering isadded. To achieve the maximum resolution potential, dithering can beincluded. By allowing multiple wavelengths, a multi-color image isprovided which further improves the contrast and resolution of the OVM.

In one embodiment of the invention, a grating period is chosen such thatthree orders diffract into the objective lens 32 at each wavelength inthe illumination. It is difficult to prescribe specific numerical valuesfor the grating period except in reference to a particular OVMapplication, but it is considered preferable to use gratings in therange of 30 to 600 lines/mm (i.e. period between 1/30th and 1/600th mm).At higher frequencies the image quality decreases because the range ofdirections viewed by the objective is sampled in an incomplete andasymmetric way as the diffraction orders become more sparse. However, inmany cases the imagery would be quite acceptable, so long as any gratingfeatures in the image are suppressed.

In another embodiment of the invention, the grating facets are separatedby blank spaces or deadzones, rather than being juxtaposed. Anillustration of such a grating surface is shown in FIG. 5, wherein thefacets 50 are separated by spaces 52. The spaces 52 are non-reflectiveand when the object is illuminated with stripes of light, such as byusing a filter 66 comprised of a series of slits (see FIG. 1), whoseimages are aligned with the reflective blazes 50 and approximatelymatched in size to them, then strongly defocused light is largelyrejected after being spread out over the deadzones 52, while the focusedimage remains largely unattenuated. This is in effect a form of scanningmicroscopy. FIG. 7 shows a slotted filter 66 having a series of slits95. Illustratively, the spacing and size of the slits 95 of the filter66 are substantially equal to the spacing a size of the grating facetsthat form the grating period.

The present invention also makes it possible to switch between objectivelenses 32 of different NA without changing the grating 28, just asobjectives are changed in a conventional normal incidence microscope.Since high NA objectives have a reduced field of view, the relay lens 26need only be corrected at full aperture over a small field. Moreover, inapplications that permit such observation (high-NA and narrow field), itmay not be necessary to require that the relay lens be telecentric andafocal as stated earlier. The dithered grating of the present inventionalso provides an opportunity for positional filtering, which can improvecontrast when one views a particular focused plane in an object havinglarge depth extent. The reflecting facets on a conventional blazedgrating reflect light from all portions of the relayed image into theobjective lens, including light scattered from object features sostrongly defocused as to form a mere blur or haze overlaying the focusedfeatures of interest. However, in a preferred embodiment of the presentinvention, the oscillated grating is also a low frequency grating havinga large period, a significant fraction of which can be dedicated to anon-reflective deadzone 52 that would then separate adjacent blazes orfacets, as shown in FIG. 5.

In addition, as shown in FIGS. 1 and 7, a slotted filter 66 comprised ofa series of slits 95 or the like may also be used in this embodiment. Asindicated above, the object is thereby illuminated with stripes oflight, whose images are aligned with the reflective blazes andapproximately matched in size to them so that strongly defocused lightis largely rejected after being spread out over the deadzones 52, whilethe focused image remains largely unattenuated. A grating of this kindalso reduces the ripple effect. The illumination must then be ditheredin synchronism with the grating in order to produce a complete imageover the time-average.

The present invention provides a polychromatic OVM system in which themicroscope objective is allowed to collect multiple diffraction ordersfrom the grating, because the orders are rendered incoherent withrespect to one another by dithering the grating in time. In a preferredembodiment, the grating is oscillated with a triangular waveform suchthat the excursion is an integer multiple of the grating period, such asabout 22 to 100 times the grating period.

The OVM system of the present invention allows the use of multipleobjectives of different NA, with the NA of the fine objectives chosen toallow two or more orders at each wavelength in the spectrum. In a sampleconfiguration appropriate for the inspection of solder pads, the 436 nmmercury line might represent the approximate center of the illuminationbandwidth, the obliquity might be around 50°, and the relay and maximumobjective NAs might be around 0.25 (in the conventionalrotation-symmetric sense). Such an obliquity produces an 2× effectiveforeshortening along one axis of the relay NA relative to the objectiveNA. Such a ratio of pupil NA to relay NA is quite suitable forminimizing chromatic channeling without accentuating the ripple effect.In another sample system, the grating excursion is large compared to theilluminated area in order to reduce the time-averaged thermal load onthe grating in high fluence applications. For example, the oscillationcan be twice as large as the widest high fluence region. Where atransmission grating is used, the dithered excursion should be largeenough to blur any cosmetic defects in the grating. For example, theoscillation can be twice as large as the defects. FIG. 8 shows anoptical system 100 in accordance with another embodiment of the presentinvention. The optical system 100 is similar to the system 10 of FIG. 1,except the reflective grating 28 of the system 10 replaced with atransmissive grating 128. In addition, the objective 32 and camera 34are located behind the transmissive grating 128.

The present invention also allows positional filtering in whichillumination having the form of an oblique series of slit images isdithered in synchronism with a custom grating containing a series ofseparated reflecting facets that serve to filter from the image any raysthat are deviated from the illuminated slit patches, such as bydiffractive spreading or by scattering from defocused features of theobject. An example of the positional filtering embodiment includesillumination that takes the form of an array of parallel slitlikeimages, spaced for example at 100 to 300 slits per mm, that are ditheredin synchronism with the grating, and whose image through the relay lensis aligned with the reflecting facets of the grating, with the gratingperiod including a significant deadzone between the reflecting facets,such as at least half of each grating period.

As indicated, a preferred embodiment includes a movable grating having arelatively low spatial frequency. The spatial frequencies envisaged hereare comprised between 30 lines/mm and 600 lines/mm. The correspondingspatial periods are comprised between 1.6μ and 33μ. The gratings areoscillated in order to sweep the grating periods, or equivalently, toramp the scattering amplitude with a time-varying phase factor.

As opposed to the conventional OVM arrangement where monochromaticity isimperative, the system of the present invention can operate at severalwavelengths simultaneously, or even with a continuous spectrum. It is nolonger necessary to hold the NA below the level at which gratingmodulation is observed.

For a more complete understanding of the invention, it is useful toconsider the operation of the OVM of the invention in qualitative terms.The arrangement resembles existing OVMs, except that multiple copies ofthe image enter the lens in each wavelength. These images are biasedinto different carrier directions (grating orders), producinginterference fringes where they recombine. The total image essentiallyconsists of the object modulated by the resolved grooves of the grating.

The grating modulation can be blurred to an arbitrarily low level in atime integrated image, if the grating is moved. One approach is tosimply provide the grating with a motion whose total excursion is largecompared with the grating period. Exact cancellation can also beobtained by dithering the grating with a triangular motion whose periodis an integer multiple of the grating period.

For clarity, the analysis of the grating motion will be in the simplecase of a one dimensional object and a grating having a period such thatonly two orders are diffracted into the objective at some wavelength ofinterest. The analysis includes the assumption of a scaler"thin-grating", i.e., in describing diffraction from the grating of anincident plane-wave component, it is assumed that the light in thenear-field just beyond the grating can be written as a sum of planewaves, each given by the product of the incident wave and a singleFourier component of the grating profile. For illumination incident onthe object at an angle α_(Illum), the amplitude in the final image is:

    A(α.sub.Illum ;x.sub.Image)=T.sub.n (α.sub.Illum ;x.sub.Image)+T.sub.n+1 (α.sub.Illum ;x.sub.Image), (1)

where n and n+1 are the two orders captured by the objective, and where:##EQU1## with A_(o) (α_(Illum)) the illumination amplitude incident fromα_(Illum), G_(n) the nth order amplitude reflectance of the grating, andO(X_(object)) the specimen reflectance. In these equations, h_(Relay)and h_(objective) are the amplitude response functions of the relay andobjective lenses. The total intensity distribution in the final image isgiven by the integral of the square of eq. 1 over all α_(Illum) and λ.If the grating excursion varies in time as a function X_(G) (t), thegrating reflectance under the above assumptions will vary as

    G.sub.n (α.sub.Illum)=|G.sub.n (α.sub.Illum)|e.sup.l(φ.sbsp.n.sup.(α.sbsp.Illum.sup.)+ 2πnλ/PX.sbsp.G.sup.(η).               (3)

If "< >" denotes time integration, then the cross term 5T_(n) T*_(n+1)in the square of eq. 1 will contain a term

    <cos  (φ.sub.n -φ.sub.n+1)+πλ/PX.sub.G (l)!>.(4)

This time average vanishes when X_(G) varies linearly with time at arate such that the grating traverses an integer number of periods duringthe integration time. The time average is bounded throughout theexcursion, and becomes arbitrarily small relative to thetime-independent terms as the excursion is increased.

According to the above analysis, the final image produced by themultiple incoherent images is equivalent to that produced by multiplediscrete directions of illumination on an effective object, where thiseffective object is essentially the convolution of the true object withthe amplitude impulse response of the relay lens. This is mathematicallysimilar to off-axis illumination in conventional imaging, a techniquesometimes used to advantage in photolithography.

However, in the present invention, there are two additional stages ofaveraging that significantly inhibit these effects. First, the discretesampling involved in the directional splitting changes continuously overthe spectrum, so that some distribution judged favorable could only beobtained at isolated wavelengths in the spectrum. Second, in most casesthe illumination applied to the object will already be continuous indirectionality (as well as spectrally), so the additional directionalmultiplication that arises at the grating is blurred out.

A large excursion embodiment is advantageous in high fluenceapplications to prevent grating damage. Even with modest excursions, thedithered grating in the present invention will blur artifact imagesdramatically, during both their imprinting on the grating and theirsubsequent projection onto the product images being analyzed. Moreover,with a large excursion, the illumination can be spread over a largearea, reducing the fluence load on the grating in high powerapplications. The oscillation direction could be chosen to maximize thetime-averaged uniformity of the dose on all grooves (so long, of course,as the oscillation is not parallel to the grooves).

As in any optical instrument pupil considerations are very important inthe OVM. It is essential to keep in mind that the OVM is in effect aninstrument which results from the combination of two distinct opticalsystems that are united through the agency of a diffraction grating.

Each system must be independently corrected and optimized. Also thediffraction grating is not simply a "passive" screen. It is a genuineoptical component which possesses imaging properties of its own.

These imaging properties must imperatively be taken into account whenthe characteristics of the total system are derived or when they areoptimized. One such property is anamorphosis. The OVM unlike mostconventional optical instrument does not have an axis of symmetry. Thissituation arises because, although the relay lens 26 and the microscopeobjective 32 are rotation symmetric, the system as a whole is notrotation symmetric. It only has a plane of symmetry. The relay lens andthe microscope objective naturally have isotropic resolution in theconventional sense. However, because the specimen is tilted, featuresperpendicular to the tilt axis are foreshortened and therefore moredifficult to resolve. Accordingly unless certain measures are taken theresolution of the OVM is a function of the azimuth of the location ofthe object with respect to this plane of symmetry. In other words, theresolution of the OVM is anisotropic with respect to coordinate axesthat are embedded in the tilted plane of the specimen. This feature isinherent to oblique imaging and is simply a geometrical consequencethereof. This anisotropy may or may not be considered an impediment.Anisotropy (provided that it is not too pronounced) is certainlyvisually extremely hard to detect and can be tolerated in mostinstances. However certain situations may call for its elimination. Thisis done by altering the pupil so that the foreshortened resolution alongone axis is matched by the resolution along the other axis, as describedby Chastang, "Oblique Viewing Attachment for Microscope", Proceedings ofthe SPIE, Vol. 399 "Optical System Design and Production", 1983.

In a preferred embodiment the relay lens pupil 26, and the microscopeobjective pupil 32 are in conjugate planes when they are superimposed.This does not mean that they are images of each other. Again it isimportant to acknowledge the imaging function of the grating in thisconjugation.

The foreshortening discussed above has the effect in the space of themicroscope pupil of causing a contraction of the circular relay lenspupil into an ellipse with smaller NA perpendicular to the tilt axis.This has the advantage of permitting the microscope objective to capturethe 2 or 3 dominant orders diffracted by the grating. This pertains tothe preferred embodiment in which the nominal NA of the relay lens andobjective are substantially equal.

Moreover in the preferred embodiment described above in which thenominal NA of the microscope objective and that of the relay lens aresubstantially equal, empty magnification in the microscope objective isminimized, thus avoiding unnecessary resolution of the ripple effect inthe grooves.

Also the anamorphosis caused by the grating will cause the image of therelay lens pupil when projected onto the microscope objective pupil tolose its "familiar" circular contour. In general the new contour iselliptical if the original contour was circular (i.e. before imaging bythe grating). If anisotropic resolution is deemed undesirable isotropicresolution may be restored by making the original contour suitablyelliptical so that after anamorphotic imaging it becomes circular.

In the case where the frequency of the grating is relatively low thediffraction grating creates a multiplicity of relay lens pupils. Thismultiplicity is equal to the number of diffracted orders which arepermitted to enter the microscope objective, to each diffracted ordercorresponds an image of the relay lens pupil. This implies that thepupil of the microscope objective must be sufficiently large toaccommodate most of these images of the relay lens pupil. It is shownabove that when the grating is translated the individual relay lenspupils can be considered optically incoherent from each other.

In yet another embodiment of the present invention, a dual OVM isimplemented to provide Koehler illumination. The use of a ditheredgrating makes it possible to increase the focal selectivity throughoperation with patterned illumination. The gratings in both afirst-stage (illuminating) OVM and a second-stage (imaging) OVM containalternating bright and dark amplitude stripes or facets. (Reflectingfacets can be "bright" or "dark" depending on whether they are blazed tomaximally diffract light into the relay lens, or away from it.) Themotion of this first-stage grating is synchronized with that of thesecond-stage grating, so that the bright stripes which sweep across theobject will always track either the dark facets (pseudo-dark-field mode)or the bright facets (bright-field mode) when re-imaged onto the secondstage grating.

The dual OVM described above will provide a Koehler Illumination Method(KIM). The KIM is highly desirable because the illumination thusproduced is very uniform and its level and degree of partial coherenceas well as the size of the illuminated area can be adjusted easily. Itis therefore widely used particularly in microscopy but needs thepresent invention to be implemented in the OVM context.

An OVM equipped with a KIM illumination is shown on FIG. 6. The system70 includes a first diffraction grating 72 and a second diffractiongrating 74. One can see the symmetry that exists in this arrangementbetween the gratings 72 and 74. Light rays 75 from Koehler illuminator76 impinges upon grating 72 perpendicular thereto. Light rays 78diffract from grating 72 at an angle A to the normal. Relay lens 80focuses light 78 onto the object 82 at angle B to the normal to theobject. Light rays 84 are reflected at angle C to the normal and focusedby relay lens 86 onto diffraction grating 74 at an angle D to the normalof the grating. Microscope objective 88 captures the diffracted light 90from the grating and projects the light onto a viewing system (notshown). Means may be provided (not shown) for oscillating one or both ofgratings 72 and 74 and/or illuminator 76. This new arrangement combinesthe principles of the OVM and of the KIM and offers the remarkableadvantages of both. It can be observed that in effect this newinstrument consists of two OVM arrangements placed face to face.Illuminator 76 has an exit pupil at infinity and images the source withfield aperture directly onto grating 72. These two positions, and onlythese two positions, are stigmatic imaging planes for such a planargrating element, allowing relay lens 80 to reproduce a uniform, sharplydefined field of illumination on specimen 82, with the source correctlyimaged at infinity.

It is important to note that the unity magnification illumination relaylens 80 does not have to be identical to the unity magnificationobservation relay lens 86, apart from being telecentric and afocal inmost instances. In particular their numerical apertures can be quitedifferent. It could be smaller or larger.

As with classical systems that provide Koehler illumination for normalincidence observation, the KIM/OVM arrangement for oblique viewingproduces a very uniform sample illumination, permits the easy andcontinuous variation of the sample illumination level, permits the easyand continuous variation of the degree of spatial coherence of thesample illumination, and permits the size of the illuminated area to beeasily adjustable. Also a variety of "classical" microscopic techniquesare readily extendable to the KIM/OVM arrangement, namely: a phasecontrast arrangement, a dark field arrangement, and a differentialinterferometric contrast type arrangement. The special prisms that thisapplication requires could be Wollaston prisms placed in the pupilplanes of the relay lenses 80 and 86.

The oblique viewing microscope system of the present invention willpermit foreign material to be distinguished from intentional patterningof the specimen. The oblique channel would also be useful in guidingcontact of a probe to the substrate. One would not have to refocus theviewer after stepping the probe, and the simultaneous oblique view ofthe probe and its shadow would be helpful in judging the approachtowards contact.

Microsurgery procedures often require unobstructed access from above.Only moderate magnification might be required during oblique viewing,but the surgeon would presumably prefer observation in white light. Heretoo, the oblique perspective could be of direct advantage, for examplein the ophthalmological technique known as "corneal sculpting", inproviding a sense of the gentle change in convexity as a cornea isablated by laser light introduced from a normal incidence channel.

Even in low NA machine vision applications where subjective color senseis not likely to be of concern, the ability to decompose an imagespectrally might still provide useful information about the scene.

While the invention has been particularly shown and described withrespect to illustrative and preferred embodiments thereof, it will beunderstood by those skilled in the art that the foregoing and otherchanges in form and details may be made therein without departing fromthe spirit and scope of the invention which should be limited only bythe scope of the appended claims.

Having thus described the invention, what is claimed as new and what isdesired to be secured by Letters Patent is:
 1. An oblique viewingmicroscope system for providing a high-resolution, multi-color image ofan object, comprising:means for reflecting an image of an object at afirst oblique angle with the normal to the object; relay means forprojecting the reflected image with a magnification of magnitudesubstantially unity; a movable diffraction grating having a gratingperiod for diffracting the projected image into a plurality of orders,said grating being tilted so that said relay means projects the imageonto said grating at a second oblique angle to the normal of thegrating, said orders as a group being diffracted substantially parallelto the normal of said grating; means for oscillating said diffractiongrating in the plane of the grating; means for illuminating the objectthrough a filter means having a plurality of slits and means foroscillating the illumination means so that said reflected image is anarray of parallel slit-like images; and detection means for capturing atleast two orders and projecting said captured orders into a displaymeans for combining said orders into a high-resolution, multi-colorimage of said object for viewing.
 2. The system of claim 1 wherein saidoscillation means oscillates said grating in a triangular waveform. 3.The system of claim 1 wherein a distance of each oscillation cycle isgreater than the grating period.
 4. The system of claim 3 where thedistance of each oscillation cycle is in the range of 2 times to 100times greater than the grating period.
 5. The system of claim 3 wherethe distance of each oscillation cycle is synchronized to be an integermultiple of the grating period.
 6. The system of claim 1 where saidcapturing means includes an objective lens means.
 7. The system of claim6 where a distance of each oscillation cycle is less than a depth offocus of the objective lens means.
 8. The system of claim 6 wherein saidobjective lens means has a numerical aperture chosen to capture two ormore wavelengths thereby providing a multicolor image for viewing. 9.The system of claim 6 where said objective lens means includes aplurality of lenses each having a different numerical aperture, thelargest numerical aperture being chosen to capture at least twodifferent orders at every wavelength thereby providing a multicolorimage for viewing.
 10. The system of claim 1 wherein a time period ofeach oscillation cycle is less than a response time of the detectionmeans.
 11. The system of claim 1 wherein said object includes one ormore high fluence regions and wherein a distance of each oscillationcycle is larger than a width of the highest fluence regions.
 12. Thesystem of claim 11 where the oscillation distance is at least two timeslarger than the width of the highest high fluence region.
 13. The systemof claim 1 where the direction of oscillation is perpendicular to thegrating lines that comprise the grating period.
 14. The system of claim1 wherein the object oscillation cycle distance is synchronized with thegrating period.
 15. The system of claim 1 where a spacing and size ofthe plurality of slits of the filter are substantially equal to aspacing and size of grating facets that form the grating period.
 16. Thesystem of claim 1 where said diffraction grating is a transmissiongrating.
 17. The system of claim 1 wherein said diffraction grating is areflection grating.
 18. The system of claim 1 wherein said first andsecond oblique angles are equal in magnitude.
 19. The system of claim 1wherein said grating comprises a plurality of triangular facets equallyspaced from each other by flat regions.
 20. The system of claim 1wherein said relay means is a telecentric and afocal lens.
 21. Anoblique viewing microscope system for providing a high-resolution,multi-color image of an object, comprising:means for reflecting an imageof an object at a first oblique angle with the normal to the object;relay means for projecting the reflected image with a magnification ofmagnitude substantially unity; a movable first diffraction gratinghaving a grating period for diffracting the projected image into aplurality of orders, said grating being tilted so that said relay meansprojects the image onto said grating at a second oblique angle to thenormal of the grating, said orders as a group being diffractedsubstantially parallel to the normal of said grating; means foroscillating said movable first diffraction grating in the plane of thegrating; and detection means for capturing at least two orders andprojecting said captured orders into a display means for combining saidorders into a high-resolution, multi-color image of said object forviewing, said reflecting means further comprising: a second diffractiongrating; means for illuminating said second diffraction grating at anangle substantially normal to said second diffraction grating; and asecond relay means for imaging the illuminated second diffractiongrating onto the object at a third oblique angle with the normal to theobject.